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Investigation of mechanical stresses in β-Ga₂O₃ films obtained by radio frequency magnetron sputtering on porous-Si/Si substrate

Andriy S. Revenko, Valerii V. Kidalov, Mykhailo P. Derhachov, Roman A. Redko, Robert P. Johnson, Marc A. Assmann, Olexandr I. Gudymenko, Oleksii O. Sushko and Mykhailo M. Koptiev

Eur. Phys. J. Appl. Phys., 100 (2025) 21

Published online: 30 July 2025

DOI: 10.1051/epjap/2025021

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