The European Physical Journal Applied Physics (EPJ AP)

A simple method to calculate incident dose for the proximity effect correction

Jian Xu, Shang Yang and Yayi Wei

Eur. Phys. J. Appl. Phys., 97 (2022) 26

Published online: 01 June 2022

DOI: 10.1051/epjap/2022210266

Jian Xu

Shang Yang

Yayi Wei

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