Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes Sanket S. Jugade, Anuj Aggarwal and Akshay K. Naik Eur. Phys. J. Appl. Phys., 94 2 (2021) 20301 Published online: 27 May 2021 DOI: 10.1051/epjap/2021210068