The European Physical Journal Applied Physics (EPJ AP)

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Samira Djerourou, Mourad Djebli and Mohamed Ouchabane

Eur. Phys. J. Appl. Phys., 85 1 (2019) 10801

Published online: 06 February 2019

DOI: 10.1051/epjap/2019180193

Samira Djerourou

Mourad Djebli

Mohamed Ouchabane

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)