The European Physical Journal Applied Physics (EPJ AP)

Control of Dual Frequency Capacitively Coupled Plasma via blocking capacitor and phase angle

Arslane Boudghene Stambouli, Rafik Benallal, Nourredine Oudini, Sidi Mohamed Mesli and Rabah Tadjine

Eur. Phys. J. Appl. Phys., 80 1 (2017) 10802

Published online: 10 October 2017

DOI: 10.1051/epjap/2017170180

Arslane Boudghene Stambouli

Rafik Benallal

Nourredine Oudini

Sidi Mohamed Mesli

Rabah Tadjine

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