The European Physical Journal Applied Physics (EPJ AP)

Enhancement mode HEMT using fluorine implantation below the channel

Saleem Hamady, Frédéric Morancho, Bilal Beydoun, Patrick Austin and Mathieu Gavelle

Eur. Phys. J. Appl. Phys., 70 3 (2015) 30102

Published online: 24 June 2015

DOI: 10.1051/epjap/2015150062

Saleem Hamady

Frédéric Morancho

Bilal Beydoun

Patrick Austin

Mathieu Gavelle

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