The European Physical Journal Applied Physics (EPJ AP)

Control of crystalline volume and nano crystal grain size in nanocrystalline silicon thin film deposited by PECVD

Thanh Tung Bui and Mau Chien Dang

Eur. Phys. J. Appl. Phys., 68 2 (2014) 20303

Published online: 18 November 2014

DOI: 10.1051/epjap/2014140364

Thanh Tung Bui

Mau Chien Dang

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