The European Physical Journal Applied Physics (EPJ AP)

Plasma polymerization of TEOS for QCM-based VOC vapor sensing

A. Bougharouat, A. Bellel, S. Sahli, Y. Ségui and P. Raynaud

Eur. Phys. J. Appl. Phys., 56 2 (2011) 24017

Published online: 28 October 2011

DOI: 10.1051/epjap/2011110144

A. Bougharouat

A. Bellel

S. Sahli

Y. Ségui

P. Raynaud

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