The European Physical Journal Applied Physics (EPJ AP)

Effect of hydrogen implantation in 6H-SiC before and after thermal oxidation

B. Arghavani Nia, S. Solaymani, A. Ghaderi, D. Agha Aligol and A. Baghizadeh

Eur. Phys. J. Appl. Phys., 55 1 (2011) 11301

Published online: 21 July 2011

DOI: 10.1051/epjap/2011100462

B. Arghavani Nia

S. Solaymani

A. Ghaderi

D. Agha Aligol

A. Baghizadeh

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