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GaAs micromachining in the 1 H₂SO₄:1 H₂O₂:8 H₂O system. From anisotropy to simulation

C. R. Tellier

Eur. Phys. J. Appl. Phys., 53 2 (2011) 20301

Published online: 28 January 2011

DOI: 10.1051/epjap/2010100176

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