A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactorV. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne and V. YegorenkovEur. Phys. J. Appl. Phys., 36 2 (2006) 177-182DOI: https://doi.org/10.1051/epjap:2006116
