Effect of annealing temperature on properties of ZnO thin films on Si(111) substrates by magnetron sputteringShoubin Xue, Huizhao Zhuang, Chengshan Xue, Shuyun Teng and Lijun HuEur. Phys. J. Appl. Phys., 36 1 (2006) 1-4DOI: https://doi.org/10.1051/epjap:2006101