AFM and XRD studies of GaAs surface after anisotropic etchingN. L. Dmitruk, V. P. Kladko, R. V. Konakova and A. V. KarimovEur. Phys. J. Appl. Phys., 27 1-3 (2004) 407-409DOI: https://doi.org/10.1051/epjap:2004119-8