Room-temperature diffusion of evaporated Fe atom into SOI materials characterized by scanning Kelvin-SPV methodS. Nakamura, H. Ikeda, D. Watanabe, M. Suhara and T. OkumuraEur. Phys. J. Appl. Phys., 27 1-3 (2004) 487-489DOI: https://doi.org/10.1051/epjap:2004119-11
