Effect of Ar annealing temperature on SiO2/SiC:SiO2 densification change causing leakage current reductionZhi Qin Zhong, Zi Jiao Sun, Shu Ya Wang, Li Ping Dai and Guo Jun ZhangEur. Phys. J. Appl. Phys., 62 2 (2013) 20301DOI: https://doi.org/10.1051/epjap/2013120491
