Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetryM. Foldyna, A. De Martino, E. Garcia-Caurel, R. Ossikovski, C. Licitra, F. Bertin, K. Postava and B. DrevillonEur. Phys. J. Appl. Phys., 42 3 (2008) 351-359DOI: https://doi.org/10.1051/epjap:2008089
