PECVD process for the preparation of proton conducting membranes for micro fuel cells. Impedance probe measurements and material characterizationsA. Ennajdaoui, J. Larrieu, S. Roualdes and J. DurandEur. Phys. J. Appl. Phys., 42 1 (2008) 9-15DOI: https://doi.org/10.1051/epjap:2008046
