Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantationD. Dorranian, P. Azadfar, A. H. Sari, S. Ghorbani, A. Hojabri and M. GhorannevissEur. Phys. J. Appl. Phys., 42 2 (2008) 103-107DOI: https://doi.org/10.1051/epjap:2008039
