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Study of bulk micromachining for 〈100〉 silicon

K. Zandi, E. Arzi, N. Izadi, S. Mohajerzadeh, S. Haji, Y. Abdi and E. Asl Soleimani

Eur. Phys. J. Appl. Phys., 35 1 (2006) 7-12

DOI: https://doi.org/10.1051/epjap:2006072

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