Diminution of the activity of B atoms by H-induced defects in H2 and B2H6 co-implanted SiKatsuhiro Yokota, Syuusaku Nakase, Kazuhiro Nakamura, Fumiyoshi Miyashita, Masayasu Tannjou, Shigeki Sakai and Hiromichi TakanoEur. Phys. J. Appl. Phys., 27 1-3 (2004) 129-132DOI: https://doi.org/10.1051/epjap:2004082
