Particulate growth in a 13.56 MHz radiofrequency methane plasma: influence of the flow rate and the incident rf powerI. Géraud-Grenier, V. Massereau-Guilbaud and A. PlainEur. Phys. J. AP, 14 3 (2001) 187-192DOI: https://doi.org/10.1051/epjap:2001158
