Monitoring the structural and chemical properties of CNx thin films during in situ annealing in a TEMS. E. Grillo, N. Hellgren, V. Serin, E. Broitman, C. Colliex, L. Hultman and Y. KihnEur. Phys. J. AP, 13 2 (2001) 97-105DOI: https://doi.org/10.1051/epjap:2001118