Spectroscopic ellipsometric evaluation of multilayer thin-film roughness using a genetic algorithmNgoidita Natebaye, Amir Moungache, Stéphane Robert and Stéphane CapraroEur. Phys. J. Appl. Phys., 101 (2026) 6DOI: https://doi.org/10.1051/epjap/2026003
