Analysis of superconducting silicon epilayers by atom probe tomography: composition and evaporation fieldKhalid Hoummada, Franck Dahlem, Federico Panciera, Etienne Bustarret, C. Marcenat, Dominique Débarre, Youssef El Amraoui and Dominique MangelinckEur. Phys. J. Appl. Phys., 98 (2023) 40DOI: https://doi.org/10.1051/epjap/2023230018