Angular distribution of sputtered particles from Inconel718: a simulation studyKawtar Bria, Mohammed Ait El Fqih, Jean-Michel Nunzi, Lamia Jadoual and Abdelilah KaddouriEur. Phys. J. Appl. Phys., 98 (2023) 26DOI: https://doi.org/10.1051/epjap/2023220334
