Study of electrical properties of Al/Si3N4/n-GaAs MIS capacitors deposited at low and high frequency PECVDWafaa Zibar, Olivier Richard, Asmaa Drighil, Touria Lachhab, Hasna Mziouek, Vincent Aimez, Abdelatif Jaouad and Rhma AdhiriEur. Phys. J. Appl. Phys., 97 (2022) 60DOI: https://doi.org/10.1051/epjap/2022220062
