Aerosol assisted atmospheric pressure plasma jet for a high deposition rate of silica-like thin filmsRomain Magnan, Richard Clergereaux, Christina Villeneuve-Faure, Benoît Lantin, Guillaume Carnide, Patrice Raynaud and Nicolas NaudeEur. Phys. J. Appl. Phys., 97 (2022) 37DOI: https://doi.org/10.1051/epjap/2022210291
