Sensitivity of germanium content on growth conditions of silicon-germanium nanoparticles prepared in nonthermal capacitively-coupled plasmasMd. Seraj Uddin, C. Vijayan and Jatindra Kumar RathEur. Phys. J. Appl. Phys., 91 2 (2020) 20801DOI: https://doi.org/10.1051/epjap/2020190302
