Reduction of residual stress in polymorphous silicon germanium films and their evaluation in microbolometersRicardo Jimenez, Mario Moreno, Alfonso Torres, Roberto Ambrosio, Aurelio Heredia and Arturo PonceEur. Phys. J. Appl. Phys., 89 3 (2020) 30101DOI: https://doi.org/10.1051/epjap/2020190245
