Surface plasmons superresolution nanolithography technique by using polydimethylsiloxane soft mold based on light couplingChuanwang He, Peng Huang, Bin Fan and Xiaochun DongEur. Phys. J. Appl. Phys., 82 3 (2018) 30401DOI: https://doi.org/10.1051/epjap/2018180184