Quantitative study for surface properties of AlGaN epi-layers by ARXPSHongquan Yang, Xiong Zhang, Shuchang Wang, Min Zhu and Yiping CuiEur. Phys. J. Appl. Phys., 72 2 (2015) 20301DOI: https://doi.org/10.1051/epjap/2015150418
