Fabrication and optical characterization of pedestal micro-structures on DUV210 polymer: waveguides structures towards micro-resonatorsMarion Specht, Nolwenn Huby, Hervé Lhermite, Rigoberto Castro-Beltran, Goulchen Loas and Bruno BêcheEur. Phys. J. Appl. Phys., 71 1 (2015) 10501DOI: https://doi.org/10.1051/epjap/2015150207
