Enhancement mode HEMT using fluorine implantation below the channelSaleem Hamady, Frédéric Morancho, Bilal Beydoun, Patrick Austin and Mathieu GavelleEur. Phys. J. Appl. Phys., 70 3 (2015) 30102DOI: https://doi.org/10.1051/epjap/2015150062
