Electrical characterization of Si doped AlN films synthesized by pulsed laser depositionSimeon Simeonov, Silvia Bakalova, Anna Szekeres, Ivaylo Minkov, Gabriel Socol, Carmen Ristoscu and Ion MihailescuEur. Phys. J. Appl. Phys., 70 1 (2015) 10102DOI: https://doi.org/10.1051/epjap/2015140163
