Synthesis of aluminium indium nitride (AlInN) thin films by stacked elemental layers methodNaveed Afzal, Mutharasu Devarajan and Kamarulazizi IbrahimEur. Phys. J. Appl. Phys., 67 1 (2014) 10301DOI: https://doi.org/10.1051/epjap/2014140144