Properties of nano-crystalline silicon thin film fabricated by electron beam exposureEun Hye Lee, Su Woong Lee, Young Ju Eom, Hae Na Won, Jin Jang, Byeong Yeon Moon and Kyu Chang ParkEur. Phys. J. Appl. Phys., 63 2 (2013) 20302DOI: https://doi.org/10.1051/epjap/2013130161
