High performance AlGaN/GaN power switch with Si3N4 insulationDefeng Lin, Xiaoliang Wang, Hongling Xiao, He Kang, Cuimei Wang, Lijuan Jiang, Chun Feng, Hong Chen, Qingwen Deng, Yang Bi, Jingwen Zhang and Xun HouEur. Phys. J. Appl. Phys., 61 1 (2013) 10101DOI: https://doi.org/10.1051/epjap/2012120366