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Charge storage characteristics of atomic layer deposited ZrO₂/Al₂O₃ multilayered films

Zhenjie Tang, Rong Li, Xinhua Zhu and Zhiguo Liu

Eur. Phys. J. Appl. Phys., 60 3 (2012) 30301

DOI: https://doi.org/10.1051/epjap/2012120351

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