Influence of nitrogen impurities on the formation of active species in Ar-O2 plasmasV. Guerra, K. Kutasi, P.A. Sá and M. Lino da SilvaEur. Phys. J. Appl. Phys., 56 2 (2011) 24004DOI: https://doi.org/10.1051/epjap/2011110194
