Advanced backside sample preparation for multi-technique surface analysisM. Py, M. Veillerot, J.M. Fabbri, F. Pierre, D. Jalabert, C. Roukoss, B. Pelissier, R. Boujamaa, C. Trouiller and J.P. BarnesEur. Phys. J. Appl. Phys., 55 3 (2011) 31001DOI: https://doi.org/10.1051/epjap/2011110191