Evolution of high aspect ratio and nano-grass structures using a modified low plasma density reactive ion etchingM. Mehran, Z. Kolahdouz, Z. Sanaee, S. Azimi and S. MohajerzadehEur. Phys. J. Appl. Phys., 55 1 (2011) 11302DOI: https://doi.org/10.1051/epjap/2011100362
