Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

This article has been cited by the following article(s):

Modeling and experimental verification of thermally induced residual stress in RF-MEMS

Aurelio Somà and Muhammad Mubasher Saleem
Journal of Micromechanics and Microengineering 25 (5) 055007 (2015)
DOI: 10.1088/0960-1317/25/5/055007
See this article

Electromechanical study of polyurethane films with carbon black nanoparticles for MEMS actuators

M Roussel, C Malhaire, A-L Deman, et al.
Journal of Micromechanics and Microengineering 24 (5) 055011 (2014)
DOI: 10.1088/0960-1317/24/5/055011
See this article

Carbon nanomembranes from self-assembled monolayers: Functional surfaces without bulk

Andrey Turchanin and Armin Gölzhäuser
Progress in Surface Science 87 (5-8) 108 (2012)
DOI: 10.1016/j.progsurf.2012.05.001
See this article

Evaluation on residual stress in Bi3.15(Eu0.7Nd0.15)Ti3O12 polycrystalline ferroelectric thin film by using the orientation average method

Y. Wei, H. B. Cheng, X. Y. Wang and X. J. Zheng
Applied Physics Letters 101 (23) 231909 (2012)
DOI: 10.1063/1.4769811
See this article

Effect of grain orientation in x-ray diffraction pattern on residual stress in polycrystalline ferroelectric thin film

L. H. Xu, D. D. Jiang and X. J. Zheng
Journal of Applied Physics 112 (4) 043521 (2012)
DOI: 10.1063/1.4748052
See this article

Anisotropic He-ion irradiation damages in nanocolumnar W thin films

Injun Oh, Donghyun Park, Euimin Cheong, et al.
Extreme Mechanics Letters 41 100984 (2020)
DOI: 10.1016/j.eml.2020.100984
See this article

Polymer Carpets

Ihsan Amin, Marin Steenackers, Ning Zhang, et al.
Small 6 (15) 1623 (2010)
DOI: 10.1002/smll.201000448
See this article

An improved method for point deflection measurements on rectangular membranes

Benoit Merle, Kyle S. Nicholson, Erik G. Herbert and Mathias Göken
Materials & Design 109 485 (2016)
DOI: 10.1016/j.matdes.2016.07.054
See this article

On the validity regime of the bulge equations

Jan Neggers, Johan P.M. Hoefnagels and Marc G.D. Geers
Journal of Materials Research 27 (9) 1245 (2012)
DOI: 10.1557/jmr.2012.69
See this article

Mechanical characterization of carbon nanomembranes from self-assembled monolayers

Xianghui Zhang, André Beyer and Armin Gölzhäuser
Beilstein Journal of Nanotechnology 2 826 (2011)
DOI: 10.3762/bjnano.2.92
See this article

A. Soma, M. M. Saleem and B. Margesin
1 (2017)
DOI: 10.1109/DTIP.2017.7984501
See this article

Sofiane Soulimane, Arnaud Pouydebasque, Sebastien Bolis, Fabrice Jacquet, Claudine Bridoux, Florian Dupont, Christophe Poulain, Stephane Moreau and Stephane Fanget
486 (2013)
DOI: 10.1109/NEMS.2013.6559776
See this article

Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures

Ali Akbar Darki, Robin Vinther Nielsen, Jens Vinge Nygaard and Aurélien Dantan
Journal of Applied Physics 131 (19) 195101 (2022)
DOI: 10.1063/5.0093016
See this article

Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

Hector A. Tinoco, Jakub Holzer, Tomáš Pikálek, Zdeněk Buchta, Josef Lazar, Alice Chlupová, Tomáš Kruml and Pavel Hutař
Thin Solid Films 672 66 (2019)
DOI: 10.1016/j.tsf.2018.12.039
See this article