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Two Temperatures Components in CCP Argon 13.56-MHz RF Discharge

Aasim A. Azooz and Zyad Tarik Ali
IEEE Transactions on Plasma Science 43 (5) 1774 (2015)
DOI: 10.1109/TPS.2015.2419252
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EEDF probe measurements: differentiation methods, noise, and error

F M Dias and Tsv Popov
Journal of Physics: Conference Series 63 012005 (2007)
DOI: 10.1088/1742-6596/63/1/012005
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