Articles citing this article

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Cited article:

Estimation of local error by a neural model in an inverse scattering problem

S. Robert, A. Mure-Rauvaud, S. Thiria, F. Badran

Eur. Phys. J. Appl. Phys., 31 1 (2005) 71-76

Published online: 2005-06-21

DOI: https://doi.org/10.1051/epjap:2005042

This article has been cited by the following article(s):

Measurement of photoresist grating profiles based on multiwavelength scatterometry and artificial neural network

Shiming Wei and Lifeng Li
Applied Optics 47 (13) 2524 (2008)
https://doi.org/10.1364/AO.47.002524

Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

Issam Gereige, Stéphane Robert, Gérard Granet, Damien Jamon and Jean-Jacques Rousseau
Optics Communications 278 (2) 270 (2007)
https://doi.org/10.1016/j.optcom.2007.06.008