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Measurement of photoresist grating profiles based on multiwavelength scatterometry and artificial neural network

Shiming Wei and Lifeng Li
Applied Optics 47 (13) 2524 (2008)
DOI: 10.1364/AO.47.002524
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Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

Issam Gereige, Stéphane Robert, Gérard Granet, Damien Jamon and Jean-Jacques Rousseau
Optics Communications 278 (2) 270 (2007)
DOI: 10.1016/j.optcom.2007.06.008
See this article