Articles citing this article

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The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Measurement of photoresist grating profiles based on multiwavelength scatterometry and artificial neural network

Shiming Wei and Lifeng Li
Applied Optics 47 (13) 2524 (2008)
https://doi.org/10.1364/AO.47.002524

Rapid Control of submicrometer periodic structures by a neural inversion from ellipsometric measurement

Issam Gereige, Stéphane Robert, Gérard Granet, Damien Jamon and Jean-Jacques Rousseau
Optics Communications 278 (2) 270 (2007)
https://doi.org/10.1016/j.optcom.2007.06.008