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Cited article:

Characterization of Nanocavities in Silicon Using Small Angle X-Ray Scattering

Myriam Dunmont, Vanessa Coulet, Gabrielle Regula and Françoise Bley
MRS Proceedings 994 0994-F06-02 (2007)
https://doi.org/10.1557/PROC-0994-F06-02