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Study of Metal Organic Chemical Vapour Deposition (MOCVD) semiconductors III-V hyperstructures with Secondary Ion Mass Spectrometry (SIMS)

D Padilla-Rueda, H Téllez Lozano, José M Vadillo and J J Laserna
IOP Conference Series: Materials Science and Engineering 59 012002 (2014)
DOI: 10.1088/1757-899X/59/1/012002
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