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Cited article:

Film formation from HMDSO: comparison of direct plasma injection with afterglow injection using an atmospheric pressure dielectric barrier discharge

Roger Wallimann, Gina Oberbossel, Denis Butscher, Philipp Rudolf von Rohr

Eur. Phys. J. Appl. Phys., 79 2 (2017) 20801

Published online: 2017-07-10

DOI: https://doi.org/10.1051/epjap/2017160478

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