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Cited article:

Thickness-dependent physical and nanomechanical properties of AlxGa1−xN thin films

N. Boughrara, Z. Benzarti, A. Khalfallah, et al.
Materials Science in Semiconductor Processing 151 107023 (2022)
https://doi.org/10.1016/j.mssp.2022.107023

Origin of positive fixed charge at insulator/AlGaN interfaces and its control by AlGaN composition

M. Matys, R. Stoklas, M. Blaho and B. Adamowicz
Applied Physics Letters 110 (24) (2017)
https://doi.org/10.1063/1.4986482