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Active species densities in R/x%N2 and R/x%(N2-5%H2) (R = Ar or He) microwave early afterglows

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The role of active species in the N 2 and N 2 -H 2 RF afterglows on selective surface nitriding of ALD-grown TiO 2 films

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The role of hydrogen in the nitriding of anatase TiO2 films in the N2-H2 microwave afterglows

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Controlling N and C-atom densities in N2/H2 and N2/CH4 microwave afterglows for selective TiO2 surface nitriding

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