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Improvements of plasma immersion ion implantation (PIII) and deposition (PIII&D) processing for materials surface modification

M. Ueda, R.M. Oliveira, J.O. Rossi, et al.
Surface and Coatings Technology 229 97 (2013)
DOI: 10.1016/j.surfcoat.2012.06.057
See this article